An, Ilsin: search on Z-Library

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1

Advanced Lithography Simulation for Various 3-Dimensional Nano/Microstructuring Fabrications in Positive- and Negative-Tone Photoresists

Kim, Sang-Kon, Oh, Hye-Keun, Jung, Young-Dae, An, Ilsin

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2011

Language:

english

File:

PDF, 4.22 MB

english, 2011

2

Real time spectroscopic ellipsometry for characterization of thin film optical properties and microstructural evolution

R.W. Collins, Ilsin An, H.V. Nguyen, T. Gu

Journal:

Thin Solid Films

Year:

1991

Language:

english

File:

PDF, 840 KB

english, 1991

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Extreme Ultraviolet (EUV) Lithography - Influence of mask surface roughness on 22nm node extreme ultraviolet lithography

La Fontaine, Bruno M., Kim, Eun-Jin, You, Jee-Hye, Kim, Seoung-Sue, Cho, Han-Ku, Ahn, Jinho, An, Ilsin, Oh, Hye-Keun

Year:

2010

Language:

english

File:

PDF, 2.76 MB

english, 2010

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Advances in Resist Materials and Processing Technology XXVI - Embedded micro/nano channel formation for three-dimensional negative-tone photoresist microstructuring

Kim, Sang-Kon, Henderson, Clifford L., Oh, Hye-Keun, Jung, Young-Dae, An, Ilsin

Year:

2009

Language:

english

File:

PDF, 730 KB

english, 2009

5

Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth

Lee, Joungchel, Rovira, P. I., An, Ilsin, Collins, R. W.

Journal:

Review of Scientific Instruments

Year:

1998

Language:

english

File:

PDF, 881 KB

english, 1998

6

Chemical equilibration of plasma-deposited amorphous silicon with thermally generated atomic hydrogen

An, Ilsin, Li, Y. M., Wronski, C. R., Collins, R. W.

Journal:

Physical Review B

Year:

1993

Language:

english

File:

PDF, 390 KB

english, 1993

7

Analysis of the optical properties and structure of sculptured thin films from spectroscopic Mueller matrix ellipsometry

N.J. Podraza, Chi Chen, Ilsin An, G.M. Ferreira, P.I. Rovira, R. Messier, R.W. Collins

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 224 KB

english, 2004

8

Alignment and calibration of the MgF2 biplate compensator for applications in rotating-compensator multichannel ellipsometry

Lee, Joungchel, Rovira, P. I., An, Ilsin, Collins, R. W.

Journal:

Journal of the Optical Society of America A

Year:

2001

Language:

english

File:

PDF, 162 KB

english, 2001

9

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Ellipsometric studies of the absorption of liquid by photo resist

Jeong, Hee, Archie, Chas N., Kyung, Jaesun, Park, Songyi, Lee, Kiyong, Lee, Hyungjoo, Cheon, Hyuknyeong, An, Ilsin, Lee, Sook

Year:

2007

Language:

english

File:

PDF, 614 KB

english, 2007

10

Real time spectroscopic ellipsometry for characterization of nucleation, growth, and optical functions of thin films

R.W. Collins, Ilsin An, H.V. Nguyen, Yiwei Lu

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 825 KB

english, 1993

11

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Advances in Resist Technology and Processing XVII - Soft bake effect in 193-nm chemically amplified resist

Sung, Moon-Gyu, Lee, Young-Mi, Lee, Eun-Mi, Sohn, Young-Soo, An, Ilsin, Oh, Hye-Keun, Houlihan, Francis M.

Year:

2000

Language:

english

File:

PDF, 284 KB

english, 2000

12

Instrumentation considerations in multichannel ellipsometry for real-time spectroscopy

Ilsin An, Yue Cong, N.V. Nguyen, B.S. Pudliner, R.W. Collins

Journal:

Thin Solid Films

Year:

1991

Language:

english

File:

PDF, 637 KB

english, 1991

13

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Advances in Resist Materials and Processing Technology XXV - Resist reflow process for arbitrary 32 nm node pattern

Henderson, Clifford L., Park, Joon-Min, An, Ilsin, Oh, Hye-Keun

Year:

2008

Language:

english

File:

PDF, 4.22 MB

english, 2008

14

Hydrogen diffusion and reaction processes in thin films investigated by real time spectroscopic ellipsometry

Ilsin An, R.W. Collins, Hien V. Nguyen, K. Vedam, H.S. Witham, R. Messier

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 432 KB

english, 1993

15

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - Pattern deformation caused by deformed pellicle with ArF exposure

You, Jee-Hye, Dusa, Mircea V., Conley, Will, An, Ilsin, Oh, Hye-Keun

Year:

2010

Language:

english

File:

PDF, 442 KB

english, 2010

16

Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study

Nguyen, Hien, An, Ilsin, Collins, R.

Journal:

Physical Review B

Year:

1993

Language:

english

File:

PDF, 946 KB

english, 1993

17

Advances in multichannel spectroscopic ellipsometry

R.W Collins, Ilsin An, H Fujiwara, Joungchel Lee, Yiwei Lu, Joohyun Koh, P.I Rovira

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 1.02 MB

english, 1998

18

Microstructural and Electrical Properties of Ba x Sr 1- x TiO 3 Thin Films on Various Electrodes

Hong, Seokmin, Bak, Heungjin, An, Ilsin, Kim, Ok Kyung

Journal:

Japanese Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 1.70 MB

english, 2000

19

Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation

An, Ilsin, Nguyen, H. V., Heyd, A. R., Collins, R. W.

Journal:

Review of Scientific Instruments

Year:

1994

Language:

english

File:

PDF, 1.98 MB

english, 1994

20

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Rotating compensator spectroscopic ellipsometry for line-width control

Lee, Ha-Young, Bang, Kyoung-Yoon, Lee, Jaeho, Bak, Heungin, Sohn, Young-Soo, An, Ilsin, Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 138 KB

english, 2002

21

Monitoring photodeposition of polymer films from diacetylene monomer solutions using in situ real-time spectroscopic ellipsometry

Du Hui, Jin-Sook Kim, Yeon-Taik Kim, Ilsin An, Mark S Paley

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 558 KB

english, 2003

22

Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle

Chi Chen, Ilsin An, G.M. Ferreira, N.J. Podraza, J.A. Zapien, R.W. Collins

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 392 KB

english, 2004

23

Microstructural evolution of ultrathin amorphous silicon films by real-time spectroscopic ellipsometry

An, Ilsin, Nguyen, H. V., Nguyen, N. V., Collins, R. W.

Journal:

Physical Review Letters

Year:

1990

Language:

english

File:

PDF, 785 KB

english, 1990

24

[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Process proximity correction by using neural networks

Kyoung-Ah Jeon,, Ji-Yong Yoo,, Jun-Taek Park,, Hyeongsoo-Kim,, Ilsin An,, Hye-Keun Oh,

Year:

2002

Language:

english

File:

PDF, 86 KB

english, 2002

25

Large optical nonlinearities in BiMnO[sub 3] thin films

Sharan, Alok, An, Ilsin, Chen, Chi, Collins, Robert W., Lettieri, James, Jia, Yunfa, Schlom, Darrell G., Gopalan, Venkatraman

Journal:

Applied Physics Letters

Year:

2003

Language:

english

File:

PDF, 415 KB

english, 2003

26

The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method

Kim, Hyoung-Hee, Park, Jun-Tack, Choi, Jung-Wook, An, Ilsin, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2004

Language:

english

File:

PDF, 145 KB

english, 2004

27

Resist Reflow Process for 32 nm Node Arbitrary Pattern

Park, Joon-Min, An, Ilsin, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 492 KB

english, 2009

28

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Alternative Lithographic Technologies - Incident angle change caused by different off-axis illumination in extreme ultraviolet lithography

Kim, Eun-Jin, Schellenberg, Frank M., La Fontaine, Bruno M., You, Jee-Hye, Kim, Seong-Sue, Cho, Han-Ku, An, Ilsin, Oh, Hye-Keun

Year:

2009

Language:

english

File:

PDF, 887 KB

english, 2009

29

In situ determination of dielectric functions and optical gap of ultrathin amorphous silicon by real time spectroscopic ellipsometry

An, Ilsin, Li, Y. M., Wronski, C. R., Nguyen, H. V., Collins, R. W.

Journal:

Applied Physics Letters

Year:

1991

Language:

english

File:

PDF, 782 KB

english, 1991

30

Waveform analysis with optical multichannel detectors: Applications for rapid-scan spectroscopic ellipsometry

An, Ilsin, Collins, R. W.

Journal:

Review of Scientific Instruments

Year:

1991

Language:

english

File:

PDF, 1.24 MB

english, 1991

31

Modification of a-Si(:H) by Thermally Generated Atomic Hydrogen: A Real Time Spectroscopic Ellipsometry Study of Si Bond Breaking

An, Ilsin, Li, Youming, Wronski, C.R., Collins, R.W.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 500 KB

english, 1992

32

Real time monitoring of filament-assisted chemically vapor deposited diamond by spectroscopic ellipsometry

Yue Cong, Ilsin An, H.V. Nguyen, K. Vedam, R. Messier, R.W. Collins

Journal:

Surface and Coatings Technology

Year:

1991

Language:

english

File:

PDF, 705 KB

english, 1991

33

Quantification of microstructural evolution in sputtered a-Si thin films by real time spectroscopic ellipsometry

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1991

Language:

english

File:

PDF, 941 KB

english, 1991

34

Photoresist Exposure Parameter Extraction from Refractive Index Change during Exposure

Sohn, Young-Soo, Sung, Moon-Gyu, Lee, Young-Mi, Lee, Eun-Mi, Oh, Jin-Kyung, Byun, Sung-Hwan, Jeong, Yeon-Un, Oh, Hye-Keun, An, Ilsin, Lee, Kun-Sang, Park, In-Ho, Cho, Joon-Yeon, Lee, Sang-Ho

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 948 KB

1998

35

Real-time optical studies in the UV range of the annealing of zirconium-oxide thin films in vacuum

Cheon, Hyuknyeong, An, Ilsin

Journal:

Journal of the Korean Physical Society

Year:

2015

Language:

english

File:

PDF, 595 KB

english, 2015

36

Rotating-Compensator Multichannel Ellipsometry: Applications in Process Development for Nanocrystalline Diamond Thin Films

Collins, R. W., Lee, Joungchel, Rovira, P. I., An, Ilsin

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 1.56 MB

english, 1997

37

Simultaneous determination of reflectance spectra along with {ψ(E), Δ(E)} in multichannel ellipsometry: applications to instrument calibration and reduction of real-time data

Ilsin An, Joungchel Lee, Byungyou Hong, R.W Collins

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 192 KB

english, 1998

38

Application of imaging ellipsometry to the detection of latent fingermarks

Journal:

Forensic Science International

Year:

2015

Language:

english

File:

PDF, 2.07 MB

english, 2015

39

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Optical Microlithography XXI - Optimum dose variation caused by post exposure bake temperature difference inside photoresist over different sublayers and thickness

Kang, Young-Min, An, Ilsin, Kim, Do Wan, Oh, Hye-Keun

Year:

2008

Language:

english

File:

PDF, 321 KB

english, 2008

40

Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer

Ilsin An, J.A. Zapien, Chi Chen, A.S. Ferlauto, A.S. Lawrence, R.W. Collins

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 149 KB

english, 2004

41

Simultaneous determination of bulk isotropic and surface-induced anisotropic complex dielectric functions of semiconductors from high speed Mueller matrix ellipsometry

Chi Chen, Ilsin An, R.W. Collins

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 163 KB

english, 2004

42

Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer

Nguyen, N. V., Pudliner, B. S., An, Ilsin, Collins, R. W.

Journal:

Journal of the Optical Society of America A

Year:

1991

Language:

english

File:

PDF, 1.58 MB

english, 1991

43

Characterization of Free-Standing Nano-Membranes by Using Ellipsometry

Park, Sungmo, Lee, Changho, An, Ilsin, Kim, Min-Su, Park, Jin-Goo, Ahn, Jin-ho

Journal:

Journal of the Korean Physical Society

Year:

2018

Language:

english

File:

PDF, 1.17 MB

english, 2018

44

Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process

Park, Joon-Min, Kim, Youngsang, Jeong, Heejun, An, Ilsin, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 399 KB

english, 2008

45

Real Time Characterization of Non-Ideal Surfaces and Thin Film Growth by Advanced Ellipsometric Spectroscopies

Collins, R. W., Rovira, P. I., Ferlauto, A. S., Koh, Joohyun, An, Ilsin, Zapien, J. A., Messier, R., Wronski, C. R.

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 2.46 MB

english, 1999

46

Order-Sorting Filters for a Grating Spectrometer and Multichannel Detection System: Application to Real-Time Spectroscopic Ellipsometry

Kim, Yeon-Taik, An, Ilsin

Journal:

Analytical Chemistry

Year:

1998

Language:

english

File:

PDF, 173 KB

english, 1998

47

[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Effect of EUV light scattering from the rough absorber and buffer side wall

Yeong-Keun Kwon,, Jun-Taek Park,, Jong-Hoi Kim,, Byung-Cheol Cha,, Seung-Wook Park,, Ilsin An,, Hye-Keun Oh,

Year:

2003

Language:

english

File:

PDF, 48 KB

english, 2003

48

Real-Time Spectroscopic Ellipsometric Studies of Photo-Assisted Chemical Processes

An, Ilsin, Oh, Hye-Keun, Paley, M. S.

Journal:

Molecular Crystals and Liquid Crystals Science and Technology Section A Molecular Crystals and Liquid Crystals

Year:

2001

Language:

english

File:

PDF, 283 KB

english, 2001

49

Simultaneous Real Time Spectroscopic Ellipsometry and Reflectance for Monitoring Semiconductor and Thin Film Preparation

An, Ilsin, Nguyen, Hien V., Heyd, A. R., Collins, R. W.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 545 KB

english, 1993

50

Real time spectroscopic ellipsometry determination of the evolution of amorphous semiconductor optical functions, bandgap, and microstructure

Y.M. Li, Ilsin An, H.V. Nguyen, C.R. Wronski, R.W. Collins

Journal:

Journal of Non-Crystalline Solids

Year:

1991

Language:

english

File:

PDF, 305 KB

english, 1991

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